| 摘要 |
Structures containing conducting polymers and methods of fabrication thereof. Electrical conductivity can be induced in polymers selected from the group consisting of substituted and unsubstituted polyanilines, polyparaphenylenevinylenes, substituted and unsubstituted polythiophenes, substituted and unsubstituted poly-p-phenylene sulfides, substituted polyfuranes, substituted polypyrroles, substituted polyselenophenes, polyacetylenes formed from soluble precursors, combinations thereof and blends thereof with other polymers. The polymer contains a doping precursor, selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides. Conductivity can be selectively induced in the polymer by selectively doping upon selective exposure to a source of energy such as electromagnetic radiation, an electron beam and heat. The electrically conductive polymers of the present invention are useful as electron discharge layers for electron beam applications, such as SEM observations, as electromagnetic interference coatings on dielectric surfaces and as an electron beam resist which acts as a discharge layer. |
