| 摘要 |
PURPOSE:To detect a trouble of an air blower without failure for reducing the destruction of a discharge tube by monitoring the operation of the air blower by monitoring the output power. CONSTITUTION:At the time of laser oscillation, a CPU 1 monitors the output power always via a power sensor 19 and compares a command value and the actual output value for calculating the drop rate (power ratio). By finding the power ratio, a change in flow velocity or a change in performance of the air blower can be known. Therefore, when the power ratio exceeds a specified critical value, the equipment can know that there is some trouble about the air blower. At this time, the CPU 1 displays an alarm on a CRT 18 and then stops operation of a laser oscillator. |
