| 摘要 |
<p>PURPOSE:To improve operatability and facilitate compatibility with diversity of tests by a method wherein an orientation-flat detector which detects the orientation-flat position of a wafer while a rotary table is rotating and so forth are provided and various operations and observations are made to be freely compatible with the test processes. CONSTITUTION:A first wafer moving means which holds a wafer 2 by the vertical movement of an elevator 3 and moves horizontally from a carrier 1, a rotary table 7 which takes the wafer 2 from the first moving means and rotates and swings it, a second wafer moving means which takes the wafer 2 from the rotary table and moves horizontally and a holder 13 which takes the wafer 2 from the second wafer moving means and transfers it to a microscope observation part are provided. Further, an orientation-flat detector which detects the orientation-flat position of the wafer 2 while the rotary table 7 is rotating, a swinging means which inclines and swings the rotary table 7 and so forth are provided. Moreover, a group of respective switches 14 are provided so as to make various operations and observations freely compatible with the test processes. With this constitution, the operability can be improved and the compatibility with the diversity of the tests can be achieved.</p> |
