| 摘要 |
PROBLEM TO BE SOLVED: To evade eliminate variations in film thickness depending on the places of a substrate holder by making a constitution in which a object shielding an evaporating material is not present between an evaporating source and a substrate fixed to a substrate holder. SOLUTION: A cage body 22 is nor rotated, and a substrate holder is fixed by substrate holder fixtures 24 and 25. The fixture 24 is mounted to the cage body 22 freely rotatably, and the fixture 25 is mounted to a rotation driving axis 22 by a constitution sliudable in the axial direction. Moreover, the substrate holder has at least two masks for forming electrodes, and the one free from projections on the surface is used at least as one mask. Thus, both of the substrate holder and a vapor deposition jig have a constitution in which they are not made shields above the masks for forming electrodes, therefore, only small shielding by the thickness of the substrate holder (the angleθ2 from A' to B') shall be applied.
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