发明名称 PATTERNING METHOD OF TRANSLUCENT THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method capable of simultaneously patterning a plurality of works and improving the manufacture throughput. SOLUTION: A patterning method of a translucent thin film is the patterning method of a translucent electrode film to pattern a translucent conductive film 61 formed on a glass substrate 60 using the laser beam, the laser beam is turned into the parallel beam using a reducer 7, a plurality of glass substrates 60 on which the translucent conductive film 61 is formed are stacked, and areas to be processed of each translucent conductive film 61 of the stacked glass substrates 60 is irradiated with the laser beam which is the parallel beam, and the areas to be processed are removed.
申请公布号 JPH09253875(A) 申请公布日期 1997.09.30
申请号 JP19960069525 申请日期 1996.03.26
申请人 SANYO ELECTRIC CO LTD 发明人 HASHIMOTO HARUHISA;HAKU HISAO;WAKIZAKA KENICHIRO
分类号 B23K26/00;B23K26/06;B23K26/073;H05K3/00 主分类号 B23K26/00
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