摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of simultaneously patterning a plurality of works and improving the manufacture throughput. SOLUTION: A patterning method of a translucent thin film is the patterning method of a translucent electrode film to pattern a translucent conductive film 61 formed on a glass substrate 60 using the laser beam, the laser beam is turned into the parallel beam using a reducer 7, a plurality of glass substrates 60 on which the translucent conductive film 61 is formed are stacked, and areas to be processed of each translucent conductive film 61 of the stacked glass substrates 60 is irradiated with the laser beam which is the parallel beam, and the areas to be processed are removed. |