| 摘要 |
PROBLEM TO BE SOLVED: To recover dust simply and efficiently under reduced pressure by a method in which a low temperature part and a high temperature part are formed in a reduced pressure container, dust in the container is stuck to the low temperature part by utilizing the thermal migration force based on the temperature difference generated between the parts. SOLUTION: In a reduced pressure container 5, a low temperature part 1 as a dust sticking place and a high temperature part 2 having a higher temperature than the low temperature part 1 are formed, and dust 7 in the container 5 is stuck to the low temperature part 1 by utilizing the thermal migration force based on the temperature difference generated between the parts 1, 2 to recover the dust 7. The pressure in the container 5, which is not limited especially, is preferably 0.01-0.0001Torr. The temperature difference between the parts 1, 2 is preferably 200-350 deg.C. The average distance between the parts 1, 2 is preferably 5-50mm. Besides, the maximum particle size of the recovered dust 7 is preferably 1-200μm.
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