CONTROL DEVICE FOR A WORK CARRYING SYSTEM

摘要

A control device for a work carrying system characterised in that a first point where the moving action of a work transitions from a moving action from an origin process chamber to a transfer chamber to a moving action inside the transfer chamber and a second point where the moving action of the work transitions from the moving action inside the transfer chamber to a moving action from the transfer chamber to a destination process chamber are set on a moving path of the work, and that speed patterns on the moving path are set based on a moving distance of the work and time required to open and close gate means of the origin and destination process chambers such that the opening of a gate valve at the destination is completed when the work reaches the second point on the moving path and that a moving time from the first point to the second point becomes the shortest time which is longer than the opening and closing time of the gate valve, the speed of a work carrying robot being thereby controlled in accordance with the set speed patterns, whereby any chance of the robot being temporarily stopped is minimized so as to effect high-speed carrying of a work such as a wafer requiring a shortest possible carrying time.