| 发明名称 |
KOZEIZAIRYOYONOHYOMENSEIMITSUKENMAZAI |
| 摘要 |
<p>PURPOSE:To provide an abrasive which enables a highly efficient surface polishing of a hard brittle material such as lithium tantalate. CONSTITUTION:An aq. slurry of particlulate silicon dioxide which is prepd. by the presipitation method and has a BET specific area of 10-60m<2>/g and a mean diameter of secondary particles as measured with a coulter counter of 0.5-5mum is used as the objective abrasive.</p> |
| 申请公布号 |
JP2656400(B2) |
申请公布日期 |
1997.09.24 |
| 申请号 |
JP19910156791 |
申请日期 |
1991.06.27 |
| 申请人 |
NIPPON SHIRIKA KOGYO KK |
发明人 |
KUNIMITSU YOSHIHIKO;FUKUNAGA TOSHIICHI |
| 分类号 |
B24B37/00;B24D3/00;C09K3/14;C30B33/10;H01L21/205;H01L21/304;H01L21/463;(IPC1-7):C09K3/14 |
主分类号 |
B24B37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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