| 发明名称 |
ANODE BONDING METHOD AND ACCELERATION SENSOR OBTAINED BY USING THE ANODE BONDING METHOD |
| 摘要 |
An anode bonding method for bonding a first substrate and a second substrate, both of which have a recessed portion, includes the steps of heating the first and second substrates in a stacked state; and bonding the substrates by applying a voltage between the substrates. <IMAGE> |
| 申请公布号 |
EP0594182(A3) |
申请公布日期 |
1997.09.24 |
| 申请号 |
EP19930117100 |
申请日期 |
1993.10.21 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
AKAIKE, MASATAKE;YAGI, TAKAYUKI;FUSHIMI, MASAHIRO |
| 分类号 |
G01P15/08;G01P15/093;G01P15/12;H01L21/02;H01L21/20;H01L29/84 |
主分类号 |
G01P15/08 |
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