| 摘要 |
<p>A synthetic diamond wafer (12) grown by deposition from a plasma has a smooth, substrate side face (16) and a rough, deposition side face (14). The rough face (14) is coated with a bonding agent (18) which fills the valleys and is finished so that its surface is parallel too the substrate side face to permit photolithographic processing of the wafer (12). Also disclosed is a multi-wafer laminate (20) of two or more diamond film layers (22, 24) bonded together with an interlayer (26). Smooth, flat outer faces (28) of the layers (22, 24) are oriented mutually parallel. The inner, bonded faces (30) may be rough. A filler of diamond particles (38) in the bonding agent (36) improves the thermal conductivity of the laminate (20). <IMAGE> <IMAGE></p> |
