发明名称 REEZANOHACHOSEIGYOSOCHIOYOBIHOHO
摘要 PCT No. PCT/JP88/00293 Sec. 371 Date Nov. 17, 1988 Sec. 102(e) Date Nov. 17, 1988 PCT Filed Mar. 18, 1988 PCT Pub. No. WO88/07276 PCT Pub. Date Sep. 22, 1988.According to present invention, the central wavelength of the central wave of the output laser beam, and the sideband wave power or central wave power of the output laser beam are detected, and the wavelength selective characteristics of wavelength selective elements disposed between a laser chamber and a rear mirror are controlled such that the detected central wavelength falls within a desired allowable range and that the detected power becomes minimum or maximum.
申请公布号 JP2657487(B2) 申请公布日期 1997.09.24
申请号 JP19870064923 申请日期 1987.03.19
申请人 KOMATSU SEISAKUSHO KK 发明人 AMADA YOSHIHO;WAKABAYASHI OSAMU;KOWAKA MASAHIKO
分类号 H01L21/30;H01L21/027;H01S3/106;H01S3/137;H01S3/225;(IPC1-7):H01S3/137 主分类号 H01L21/30
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