| 摘要 |
PURPOSE: To provide a processing technique which enables improvement in productivity. CONSTITUTION: In a processing chamber (body) 1, a stage (setting stage) 2 for supporting a processing target 3 is provided, and a guide plate 4 forming a predetermined flow passage 5 between the surface of the processing target 3 and the guide plate 4 is provided. A processing fluid 7 containing ozone generated by an ozone generation source is supplied from a nozzle 6 to the flow passage 5. A light source 8 for irradiating the processing target 3 with a light for exciting the processing fluid 7 via the guide plate 4 is provided near and along the surface of the guide plate 4. The setting stage 2 is relatively displaceable with respect to the guide plate 4, and the gap between the guide plate 4 and the processing target 3 is variable. |
