发明名称 |
HANDOTAIATSURYOKUHENKANSOCHI |
摘要 |
<p>A semiconductor pressure converting device including a fixing table joined to a silicon diaphragm consists of 2 structures superposed on each other, in which the longitudinal elastic modulus of the first fixing table is significantly different from the longitudinal elastic modulus of the semiconductor diaphragm. The first fixing table is highly insulating and the linear expansion coefficient thereof is approximately equal to the linear expansion coefficient of the semiconductor diaphragm. The second fixing table is made of a material having a longitudinal elastic modulus and a linear expansion coefficient approximately equal to those of the semiconductor diaphragm.</p> |
申请公布号 |
JP2656566(B2) |
申请公布日期 |
1997.09.24 |
申请号 |
JP19880214985 |
申请日期 |
1988.08.31 |
申请人 |
HITACHI SEISAKUSHO KK |
发明人 |
HIDA TOMOYUKI;SASE AKIRA;YAMAMOTO YOSHIKI;SHIMADA SATOSHI |
分类号 |
G01L9/04;G01L9/00;G01L9/06;G01L13/06;G01L19/00;(IPC1-7):G01L9/06 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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