Method and apparatus for drilling holes in solid material by laser beam irradiation

摘要

A hole may be drilled in solid material (1) such as a metal or ceramic by laser beam irradiation from a laser source such as an excimer laser (2) or a Nd.YAG laser (3) in an improved manner by heating at least the area being drilled of the material (1) to at least 25 degrees C above ambient temperature. This enables a hole with a larger exit diameter to be drilled for a specific laser pulse power than conventionally.