| 摘要 |
A process is provided for use with a semiconductor testing apparatus having a vector generator which provides a sequence of vectors to a semiconductor device at a rate responsive to a timeset, a power supply which provides current to the semiconductor device and a current monitor which measures the current provided to the device. In one specific embodiment, the process includes setting the timeset to a first rate, conditioning the device by executing a plurality of vectors at the first rate, setting the timeset to a second rate, the second rate being slower than the first rate, and measuring the quiescent current while the timeset is set to the second rate.
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