发明名称 |
Pressure type flow rate control apparatus |
摘要 |
A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.
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申请公布号 |
US5669408(A) |
申请公布日期 |
1997.09.23 |
申请号 |
US19960661181 |
申请日期 |
1996.06.10 |
申请人 |
FUJIKIN INCORPORATED |
发明人 |
NISHINO, KOJI;IKEDA, NOBUKAZU;MORIMOTO, AKIHIRO;MINAMI, YUKIO;KAWADA, KOJI;DOHI, RYOSUKE;FUKUDA, HIROYUKI |
分类号 |
F16K17/22;F16K31/02;G05D7/06;G05D16/20;H01L21/3065;(IPC1-7):F16K31/12 |
主分类号 |
F16K17/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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