| 摘要 |
A region of a semiconductor device to be analyzed is initially divided a plurality of fractional elements of predetermined configuration. With respect to each fractional element, adjacent element information is provided. Then, a new nodal point is added. Then, one fractional element having a circumscribed circle enclosing the new nodal point is retrieved. Another fractional elements adjacent the retrieved fractional element and having the circumscribed circle enclosing the new nodal point are retrieved for establishing a fractional element group of the fractional elements having the circumscribed circles enclosing the new nodal point. The fractional elements are established on the basis of the boundary of the fractional element group and the new nodal point. The adjacent element information is then added for respective of the newly established fractional elements.
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