摘要 |
A thin-film transistor array for display comprises a substrate and an interconnection layer, a plurality of pixel electrodes and thin-film transistors are integrally formed on the substrate, the interconnection layer is patterned so as to connect individual thin-film transistors, and at least part of the interconnection layer is laminated with a conductive layer and a metal layer having a smaller resistive value than the conductive layer being overlaid on the conductive layer in such a manner that the conductive layer is of a sufficient layer thickness to ensure the physical continuity of the thin-film pattern and the metal layer contributes to the lowering of the line surface resistance and is overlaid thinly enough to prevent the occurrence of surface variations such as hillocks.
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