Wafer carriage

摘要

A wafer carriage is disclosed. An edge of the wafer carriage is roundly formed so that an edge of the wafer when colliding against the wafer can be prevented from chipping, pads are provided to a guide on the upper side of the wafer carriage so that the wafer when moving can be prevented from sliding, and thus, the wafer chipping occurred in a successive process can be prevented.