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发明名称
METHOD FOR PULLING UP SINGLE CRYSTAL
摘要
申请公布号
JPH09249486(A)
申请公布日期
1997.09.22
申请号
JP19960058863
申请日期
1996.03.15
申请人
SUMITOMO SITIX CORP
发明人
IZUMI TERUO
分类号
C30B15/22;C30B15/00;C30B15/36;C30B29/06;H01L21/208;(IPC1-7):C30B15/22
主分类号
C30B15/22
代理机构
代理人
主权项
地址
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