发明名称 |
Optical element, production method of optical element, optical system, and optical apparatus |
摘要 |
An optical element for X-ray reflection according to the present invention is provided with a number of fine convex surfaces or concave surfaces regularly arranged on a substrate. Multilayer films reflecting X-rays are formed over the convex surfaces or concave surfaces. The convex surfaces or concave surfaces have such a shape that when X-rays enter each concave surface or convex surface, they are reflected with a certain diverging angle by the multilayer films and as a result that a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a certain distance apart from the concave surfaces or convex surfaces. By this, a number of secondary X-ray sources are formed to enable uniform irradiation of X-rays in a wide region.
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申请公布号 |
US5669708(A) |
申请公布日期 |
1997.09.23 |
申请号 |
US19960608077 |
申请日期 |
1996.02.28 |
申请人 |
NIKON CORPORATION |
发明人 |
MASHIMA, KIYOTO;MORI, TAKASHI;TANITSU, OSAMU |
分类号 |
G03F7/20;G21K1/06;(IPC1-7):G21K1/06 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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