| 摘要 |
PROBLEM TO BE SOLVED: To reduce the time required for exposure transfer in an apparatus and method for exposure. SOLUTION: Two sets of holders 11, 12 for holding an original sheet 4 and substrate 5 are disposed on a scan stage 3 to scan between two sets of relay optical systems 20, 21 provided according to the scan positions P1, P2, P3 of the original sheet 4 and substrate 5 and a projection optical system 9. During exposure scanning of one substrates 5A, 5B, the other substrates 5B, 5A are aligned to thereby greatly improve the exposure scan and alignment efficiency of the substrate 5. |
