| 摘要 |
PROBLEM TO BE SOLVED: To form an optical thin film having satisfactory optical characteristics by sputtering. SOLUTION: A target made of a mixture of MgF2 with other fluoride such as AlF3 , BaF2 , CaF2 , LiF, Na3 AlF6 or Na5 Al3 F14 is sputtered. The dissociation of fluorine is inhibited and a low refractive index film having very low absorption is stably formed. |
