| 摘要 |
PROBLEM TO BE SOLVED: To provide the mechanism for housing an autohandler, which seals an IC into a pallet during the movement of a mounting stage for the pallet. SOLUTION: In a pallet 1, grooves 1A for mounting a plurality of ICs in one line are formed by a plurality of lines at the same plane. The end part of the groove 1A is an open end 11, and the other end part is made to be a closed end 12. A mounting stage 2 mounts the pallet 1, and a rotary shutter 2A is arranged on the side of the open end 11. A rack 3 movably links the mounting stage 2. A lift 4 is arranged at the neighborhood of the rack 3. When the pallet 1 is mounted on the mounting stage 2 and the open end 11 of the pallet 1 is moved to the neighborhood of the lift 4, the rotary shutter 2A is linked to the lift 4. When the lift 4 rises up, the rotary shutter 2A is rotated, and the open end 11 is opened. When the lift 4 is lowered and returned, the rotary shutter 2A is rotated in the reverse direction, and the open end 11 is closed. |
