| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a secondary ion mass spectrograph which can microanalyze light element. SOLUTION: The secondary ion mass spectrograph comprises ion generating means 10 for emitting a primary ion beam to the part of a sample, analyzing means 24 for analyzing secondary ion sputter excited from the surface with the primary ion beam, and electron generating means 14 for generating electron for neutralizing charge generated on the surface of the sample by the generation of the secondary ion beam, wherein infrared beam generated from heating means 34 is emitted to the sample S, mass analysis is made in the state of no background due to the residual element by emitting the primary ion beam after the remaining element adhered to the surface of the sample S is previously vaporized by the primary ion beam, and hence the light element can be microanalyzed.</p> |
