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发明名称
PROCESS OF MANUFACTURE OF SILICON-ON-INSULATOR STRUCTURE
摘要
申请公布号
RU2090952(C1)
申请公布日期
1997.09.20
申请号
RU19950116551
申请日期
1995.09.26
申请人
KHAUSTOV VLADIMIR A
发明人
KHAUSTOV VLADIMIR A
分类号
H01L21/84;(IPC1-7):H01L21/84
主分类号
H01L21/84
代理机构
代理人
主权项
地址
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