发明名称 POSITIONING TABLE CONTROLLER
摘要 <p>PROBLEM TO BE SOLVED: To eliminate the oscillation of a control system even if an excess command value to saturate a current amplifier is input by providing means for feeding back the deviation signal of a current command value from the actual motor current value to a position or current command value. SOLUTION: A route for feeding back the deviation voltage Vd output from a current amplifier 14 to a command value via an A-D converter 19 and a digital filter 20 is provided. Such a feed-back loop is provided, and hence even if an excess command value for causing an oscillation is given, the voltage Vd is fed back to the command value side. Accordingly, the gradient of the command value is corrected to the level for inhibiting the saturation of the amplifier. As a result, a table can follow up the command value without oscillation. Therefore, a table controller having extremely high reliability can be obtained.</p>
申请公布号 JPH09246359(A) 申请公布日期 1997.09.19
申请号 JP19960073117 申请日期 1996.03.05
申请人 CANON INC 发明人 OISHI SHINJI
分类号 G03F9/00;B23Q15/26;B23Q16/02;G05D3/12;H01L21/027;H01L21/68;(IPC1-7):H01L21/68 主分类号 G03F9/00
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