NEUTRAL PARTICLE INCIDENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a neutral particle incident device having a vacuum vessel miniaturized and reduced in manufacturing cost. SOLUTION: Vessels of an ion source tank 12 and a neutralized cell tank 26 are made of a stainless clad steel formed of a composite material of SS 400 (soft steel) base materialβand SUS 304 (stainless steel). The soft steel plays the role of holding the vessel in high vacuum. Thus, the ion source tank part and the neutralized cell part which had a triple structure in the past can be made into double structure vessels.