| 摘要 |
PROBLEM TO BE SOLVED: To simplify the recovering operation of a positional deviation amount by providing means for holding a material to be treated, driving means for moving the holding means, means for detecting the positional deviation of the holding means from a predetermined position, and correcting means for feeding back the positional deviation to the driving means. SOLUTION: A board W is held by a head 43, and the head 43 is moved along ball screws 44, 46 by stepping motors 45, 47. The positional deviation of the head 43 from the predetermined position of an ultraviolet emitting unit 33 is detected by LEDs 333 provided at both sides of the window 332 of the housing 331 of the unit 33 and PSGs 431 provided at both sides of the head 43. The detected deviation is fed back to the motors 45, 47 by correcting means to move the head 43. Thus, the recovering operation of the deviation of a material-to-be-treated conveyor can be simplified merely by applying slight regulation. |
