| 摘要 |
PROBLEM TO BE SOLVED: To prevent the damage of a conveying device by preventing it from remaining in a process module. SOLUTION: A substrate is conveyed by having a conveying device 3 controlled by a treatment means 5b in accordance with the process conducted by a process retaining means 5a. When an instruction for stopping the movement of the conveying device 3 is given to a controller 5 from a conveyance stopping means 8 in the midway of treatment of entering and leaving operation to and from a process module, a conveyance stop flag is provided when a stop and retain means 5a received a stop instruction. After the treatment of the entering and leaving movement of the conveying device has been finished, the treatment means 5b detects whether a flag is provided on a stop and retain means 5c in accordance with the process of the process retaining means 5a, and the conveying treatment is stopped when the flag is provided. As a result, the conveying device 3 is prevented from remaining in the process module. |
