DRY ETCHING AND MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19960057142-传众专利搜索

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发明名称	DRY ETCHING AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH09246246(A)	申请公布日期	1997.09.19
申请号	JP19960057142	申请日期	1996.03.14
申请人	FUJITSU LTD	发明人	TANI KOJI
分类号	H01L21/28;H01L21/265;H01L21/302;H01L21/3065;H01L21/768;(IPC1-7):H01L21/306	主分类号	H01L21/28
代理机构		代理人
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地址

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