| 摘要 |
PROBLEM TO BE SOLVED: To realize high reliability and high efficiency by providing a commutation circuit for diverting discharge currents of a second capacitor in different directions and a regenerative circuit for regenerating diverted energy to thereby regenerate excess energy. SOLUTION: A series circuit consisting of a commutation circuit 30 and a regenerative circuit 40 is connected to a second capacitor C2 in parallel. The commutation circuit 30 commutes discharge currents of the second capacitor C2 to the regenerative circuit 40 after the discharge of a laser discharge electrode 20 is completed. By this commutation function, all of the excess energy of the second capacitor C2 is transferred to the regenerative circuit 40 through the commutation circuit 30. The regenerative circuit 40 accumulates the transferred energy, converts the accumulated energy into dc or ac currents and regenerates the currents to a first capacitor C1 or a charging power supply 10. |
