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发明名称
METHOD AND DEVICE FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号
JPH09246251(A)
申请公布日期
1997.09.19
申请号
JP19960071145
申请日期
1996.03.01
申请人
SONY CORP
发明人
SASAKI MASAYOSHI
分类号
C23F4/00;H01L21/027;H01L21/265;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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