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发明名称
GAS PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH09245936(A)
申请公布日期
1997.09.19
申请号
JP19960259147
申请日期
1996.09.30
申请人
MASUDA YOSHIKO
发明人
MASUDA SENICHI
分类号
H05H1/46;B01D53/32;B01J19/08;H01T19/00;H01T23/00;(IPC1-7):H01T23/00
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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