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发明名称
SEMICONDUCTOR WAFER DAMAGE EVALUATING SAMPLE AND DAMAGE EVALUATING METHOD USING THEREOF
摘要
申请公布号
JPH09246341(A)
申请公布日期
1997.09.19
申请号
JP19960054858
申请日期
1996.03.12
申请人
NIPPON STEEL CORP
发明人
MORIYA AKIHIRO
分类号
G01N21/88;G01N21/93;G01N21/956;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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