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发明名称
INSPECTING DEVICE
摘要
申请公布号
JPH09243704(A)
申请公布日期
1997.09.19
申请号
JP19960073304
申请日期
1996.03.04
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
ICHIKAWA KIMINORI;HIRAISHI AKIHIKO;KOBAYASHI HIROYUKI;SUDA TOMIJI
分类号
G01R31/26;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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