| 摘要 |
PROBLEM TO BE SOLVED: To obtain a blind device which prevents an overlapped part from being generated on a projection face on a wafer even when a gap is eliminated with reference to an adjacent exposure region by a method wherein two rectilinear blinds which are not parallel to each other in the transmission region of exposure light and which constitute opposite rectilinear parts are provided. SOLUTION: Slit-shaped X-rays reflected by reflection parts in different states are spread when they pass through the upper part of a blind device, and they are narrowed when they pass through the lower part of the blind device. At this time, the shape at the X-ray cutoff end part of a blind 2f and that of a blind 2e are formed oblique in such a way that the upper part of an X-ray transmission region at the blind device is narrow and that the lower part becomes wide. Then, regarding the slit-shaped X-rays which are reflected so as to be warped in an arched shape, their transmitted state is changed into a rectilinear shape at the upper end part and the lower end part of the X-ray transmission region by blinds 2g, 2h whose shape is warped reversely. |
