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发明名称
ION INPLANTING DEVICE
摘要
申请公布号
JPH09245723(A)
申请公布日期
1997.09.19
申请号
JP19960071072
申请日期
1996.02.29
申请人
NISSIN ELECTRIC CO LTD
发明人
NIIYAMA TETSUO
分类号
H01J37/248;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/248
代理机构
代理人
主权项
地址
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