| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a high-quality disk free from the misalignment of two sheets of circular resin substrates by a small-sized device by rotating a rotary holding table to uniformly spread the adhesive between the circular resin substrates and pressing the end faces of central holes with plural opening/closing vanes. SOLUTION: The second circular resin substrate D2 is placed via the adhesive R on the first circular resin substrate D1 of the rotary holding table X. The rotary holding table X is thereafter rotated to uniformly spread the adhesive R between the first and second circular resin substrates D1 and 2 over the entire part of the disk by centrifugal force and the suction force of the suction grooves P around a boss A1. The plural opening/closing vanes 11 are opened outward by the rotation, by which the pressure is applied on the end faces of the central holes DH of both circular resin substrates to press the end faces. As a result, two sheets of the circular resin substrates are made surely concentric and the misalignment of the first and second circular resin substrates D1 and 2 is corrected. The curing of the adhesive R is executed after the end of the spreading of the adhesive R. As a result, the high- quality disk free from the misalignment between two sheets of the circular resin substrates is obtd. by the small-sized device.</p> |
