| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a chip pickup method which reliably picks up a chip adhered to an adhesive sheet by using a collet without pickup error. SOLUTION: A collet 23, driven by a second motor 22, moves upward/ downward, vacuum-sucks a chip 4 on an adhesive sheet 3, and picks up the chip 4. A needle 9, driven by a first motor 11, thrusts the chip 4 on the adhesive sheet 3. It is confirmed that the collet 23 has reached the upper surface of the chip 4 and stopped its movement, and the needle 9 has reached the lower surface of the adhesive sheet 3 and stopped its elevation. Thereafter, if a predetermined period has elapsed, the first motor 11 and the second motor 22 are driven to simultaneously move the needle 9 and the collet 23 upward, such that the collet 23 picks up the chip 4 while the needle 9 thrusts the chip 4.</p> |
