| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to always efficiently align by providing the function for introducing a measuring route by targeting at the alignment mark position without depending upon an alignment shot in the order of measuring the alignment mark at the time of aligning. SOLUTION: A plurality of shots of a plurality of shot regions on a board 4 are designated as alignment shots. The order of mark measuring is decided from the alignment mark position in the designated alignment shot. XY stage 3 is sequentially driven via an XY stage controller 8 by the command from a control calculator 7 according to the decided measured order to measure the deviation of the mark on the wafer 4 by a microscope 5 and a detector 6. The deviation is stored in the register corresponding to the mark by the calculator 7, all the shots are measured, and the deviation of the board 4 is calculated. Thus, efficient alignment can be conducted.</p> |
