发明名称 |
MANUFACTURE OF SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE:To obtain the wiring layer which has a high resistance to thermal and mechanical stress through a simple process in which the thermal process is carried out after the anode oxidation process of Al. |
申请公布号 |
JPS52120779(A) |
申请公布日期 |
1977.10.11 |
申请号 |
JP19760038059 |
申请日期 |
1976.04.05 |
申请人 |
NIPPON ELECTRIC CO |
发明人 |
HIGUCHI KOUICHI;TAKAHATA KOUICHIROU;KUBOTA TAKEHIKO |
分类号 |
H01L21/3205;H01L21/02;H01L21/28 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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