| 摘要 |
PROBLEM TO BE SOLVED: To decrease wearing amount of a support fixture and shorten a time for polishing so as to attain improving of productivity, by forming a relation between 10-point mean roughness and a mean waviness period of a reference surface of a pad for positioning, in a specific range. SOLUTION: A wearing amount of a support fixture 5 depends upon roughness and irregular density in reverse proportion to a space period of waviness of a reference surface 3 of a pad 2 of a funnel 1. By setting 10-point mean roughness R2 and a mean waviness period Sm of the reference surface 3 in a range displayed by 0.7%<=R2 /Sm<=3%, a relatively short treating time and a relatively small wearing amount of the support fixture are discovered to be compatible. In the case of R2 /Sm less than 0.7%, a time required for polishing is rapidly increased, and in the case of exceeding 3.0%, a wearing amount of the support fixture 5 is largely increased, so as to make undesirable. Preferably, R2 is set to 10μm or less. Further, preferably, a carbon material or the like, which is a material of 2 or more by Morse hardness lower than glass of the funnel 1, is used so as to prevent the pad 2 from flawing, in the support fixture 5.
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