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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
JPH09246244(A)
申请公布日期
1997.09.19
申请号
JP19960054475
申请日期
1996.03.12
申请人
SONY CORP
发明人
MORI SUMIO
分类号
H05H1/46;C23C16/50;C23F4/00;C30B33/12;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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