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发明名称
ELECTRON BEAM EXPOSURE METHOD AND DEVICE THEREFOR
摘要
申请公布号
JPH09245717(A)
申请公布日期
1997.09.19
申请号
JP19960079388
申请日期
1996.03.08
申请人
NEC CORP;KURESUTETSUKU:KK
发明人
OCHIAI YUKINORI;YAMAGUCHI MASAYUKI;KUDO KOJI;SHINGU TERUO;HAYASHI KUNIHITO;KOBAYASHI KAZUHIKO
分类号
G03F7/20;H01J37/305;H01L21/027;(IPC1-7):H01J37/305
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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