| 摘要 |
PROBLEM TO BE SOLVED: To provide an accelerometer which is excellent in a shock-resistant property, which can measure even a large acceleration, whose sensitivity is high over a wide frequency region in which an irregularity in a characteristic such as sensitivity or the like is extremely small and which is compact. SOLUTION: Piezoelectric substrates (composed of LiNbO3 ) 2a are formed on both faces of a shim (an Si substrate) 30 by a direct bonding operation. The piezoelectric substrates 2a and piezoelectric substrates are bonded in such a way that the direction of apolarization axis becomes an opposite direction. One end of a piezoelectric element is sandwiched and held between supports (composed of LiNbO3 ) 4a, 4b. In this case, the piezoelectric substrates 2a are bonded directly to the supports 4a, 4b. Electrodes 3a, 3b are formed respectively in parts which are not sandwiched and held between the supports 4a, 4b on outside faces of the piezoelectric substrates 2a. A piezoelectric oscillator 1 is housed in a container 10d in which the surface and one side face are opened and which is composed of LiNbO3 . The supports 4a, 4b are bonded directly to the inside wall of the container 10a. A container 10c which is composed of LiNbO3 and whose shape is identical to that of the container 10d is bonded to the container 10d. |
