发明名称 ALGAAS EPITAXIAL WAFER AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To obtain an AlGaAs-based light emitting diode, which can be used at a wavelength shorter than 660nm. SOLUTION: In this diode, clad layers 3 and 5 of a double heterostructured AlGaAs epitaxial wafer are constituted of AlGaAs having the AlAs mixed- crystal ratio of 0.75 or more. Thus, the high-luminance light emission in the short wavelength region of 600-630nm can be performed. Furthermore, a window layer 6, whose AlAs mixed-crystal ratio is lower than the clad layer, is provided on the clad layer 5 on the PN junction side of the clad layers. Thus, the oxidation phenomenon at the surface of the wafer caused by the high AlAs mixed- crystal ratio is prevented. For the respective layers, which are sequentially formed on the GaAs substrate 1, a first layer 2 and a third layer 4 and the second layer 3 and the fourth layer 5 are grown and formed by using the same common growing solution, respectively. Thus, the reduction of the manufacturing cost is also achieved.
申请公布号 JPH09246591(A) 申请公布日期 1997.09.19
申请号 JP19960051166 申请日期 1996.03.08
申请人 HITACHI CABLE LTD 发明人 KURIHARA TORU;TOYOSHIMA TOSHIYA;NOGUCHI MASAHIRO
分类号 H01L33/14;H01L33/30;H01L33/36 主分类号 H01L33/14
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