发明名称 Angular velocity sensor
摘要 A downsized angular velocity sensor (21) is disclosed in which the detection sensitivity is improved. An oscillator (26) oscillatably supported by support beams along two horizontal axes is formed of two rod-like members (26A) extending along the Y axis and an interconnecting portion (26B). A hollow region is formed between each of the rod-like members (26A) and the interconnecting portion (26B). Displacement detecting sections (34) are disposed in the hollow regions. The displacement detecting sections (34) are each constructed of an antenna-like electrode array (28, 32), so that a greater amount of change in capacitance generated between the antenna-like electrodes (28, 32) can be obtained. <IMAGE>
申请公布号 EP0795737(A1) 申请公布日期 1997.09.17
申请号 EP19970104070 申请日期 1997.03.11
申请人 MURATA MANUFACTURING CO., LTD. 发明人 MORIYA, KAZUFUMI;HASEGAWA, TOMOYASU;TAKATA, EIICHI;SHIBANO, TOMIO;OSAWA, TETSUO
分类号 G01C19/56;G01P9/04 主分类号 G01C19/56
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