HANDOTAISHUSEKIKAIROSOCHI

摘要

PURPOSE:To prevent the disconnection of aluminum wiring at the second layer in a part which is stepped because of aluminum wiring at the first layer, by causing the thickness of aluminum wiring at the first layer to be thinner than that of aluminum wiring at the second layer. CONSTITUTION:Aluminum wiring Al 1 at the first layer is mounted on a layer insulation film 3 and aluminum wiring Al 2 at the second layer is mounted on the layer insulation film 4. In such a case, this device allows the thickness of wiring Al 1 to be thinner than that of wiring of Al 2. Then, a stepped part which is caused by wiring Al 1 at the base surface of wiring Al 2 becomes small. Thus, this situation serves the purpose of improving the step coverage of wiring Al 2 at the stepped part and accordingly, preventing the disconnection of wiring Al 2 at the stepped part.