发明名称 KANKOSEISOSEIBUTSU
摘要 PURPOSE:To improve sensitivity, resolution and film remaining ratio by incorporating an aromatic sulfonate of onium compd., and such a compd. the affinity or solubility of which to a developer decreases in the reaction which uses an acid as a catalyst. CONSTITUTION:The compsn. contains an aromatic sulfonate of onium compd., and such a compd. the affinity or solubility of which to a developer decreases in the reaction which uses an acid as a catalyst. Namely, by incorporating the aromatic sulfonate of onium compd. such as diaryl iodonium or triarylsulfonium and the compd. the affinity or solubility of which to a developer decreases in the reaction which uses an acid as a catalyst, the obtd. photosensitive compsn. acts as a negative-type picture image forming material when a developer is properly selected. This photosensitive compsn. has sensitivity to UV ray, visible light, electron beam or X-ray.
申请公布号 JP2655370(B2) 申请公布日期 1997.09.17
申请号 JP19910204205 申请日期 1991.08.14
申请人 FUJI SHASHIN FUIRUMU KK 发明人 UENISHI KAZUYA;AOTANI NORIMASA;UMEHARA AKIRA;YAMAOKA TSUGIO
分类号 G03F7/00;G03F7/004;G03F7/029;G03F7/038;H01L21/027;H01L21/30;(IPC1-7):G03F7/038 主分类号 G03F7/00
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